Open Collections

UBC Theses and Dissertations

Featured Collection

UBC Theses and Dissertations

Characterizing etched grating profiles with the Alpha-particle Energy Loss method Kaiser, Christina

Abstract

The effectiveness of Alpha-particle Energy Loss (AEL) spectroscopy for profiling 1D grating structures was investigated. An analytic simulation of AEL spectra was developed and compared with a Monte Carlo simulation. By a least squares fitting procedure, the analytic simulation was used to extract grating parameters from the experimental spectra of two types of grating structures. A 1D grating of silicon bars on a free standing silicon dioxide support layer was fabricated and profiled by AEL spectroscopy: the grating depth was determined along with a qualitative assessment of the grating sidewalls. AEL profiling of a gallium arsenide grating structure yielded measurement values in agreement with those obtained with a scanning electron microscope.

Item Metadata

Title	Characterizing etched grating profiles with the Alpha-particle Energy Loss method
Creator	Kaiser, Christina
Publisher	University of British Columbia
Date Issued	2001
Description	The effectiveness of Alpha-particle Energy Loss (AEL) spectroscopy for profiling 1D grating structures was investigated. An analytic simulation of AEL spectra was developed and compared with a Monte Carlo simulation. By a least squares fitting procedure, the analytic simulation was used to extract grating parameters from the experimental spectra of two types of grating structures. A 1D grating of silicon bars on a free standing silicon dioxide support layer was fabricated and profiled by AEL spectroscopy: the grating depth was determined along with a qualitative assessment of the grating sidewalls. AEL profiling of a gallium arsenide grating structure yielded measurement values in agreement with those obtained with a scanning electron microscope.
Extent	7674457 bytes
Genre	Thesis/Dissertation
Type	Text
File Format	application/pdf
Language	eng
Date Available	2009-07-30
Provider	Vancouver : University of British Columbia Library
Rights	For non-commercial purposes only, such as research, private study and education. Additional conditions apply, see Terms of Use https://open.library.ubc.ca/terms_of_use.
DOI	10.14288/1.0099589
URI	http://hdl.handle.net/2429/11554
Degree	Master of Science - MSc
Program	Physics
Affiliation	Science, Faculty of; Physics and Astronomy, Department of
Degree Grantor	University of British Columbia
Graduation Date	2001-05
Campus	UBCV
Scholarly Level	Graduate
Aggregated Source Repository	DSpace

Item Media

ubc_2001-0221.pdf -- 7.32MB

Item Citations and Data

Rights

For non-commercial purposes only, such as research, private study and education. Additional conditions apply, see Terms of Use https://open.library.ubc.ca/terms_of_use.