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Characterizing etched grating profiles with the Alpha-particle Energy Loss method Kaiser, Christina

Abstract

The effectiveness of Alpha-particle Energy Loss (AEL) spectroscopy for profiling 1D grating structures was investigated. An analytic simulation of AEL spectra was developed and compared with a Monte Carlo simulation. By a least squares fitting procedure, the analytic simulation was used to extract grating parameters from the experimental spectra of two types of grating structures. A 1D grating of silicon bars on a free standing silicon dioxide support layer was fabricated and profiled by AEL spectroscopy: the grating depth was determined along with a qualitative assessment of the grating sidewalls. AEL profiling of a gallium arsenide grating structure yielded measurement values in agreement with those obtained with a scanning electron microscope.

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