UBC Theses and Dissertations
Microsput : a microcomputer operating system for planar magnetron sputtering McMahon, Richard William
A Microcomputer software package was developed to monitor and control the planar magnetron sputtering process, and to record and display data from the process equipment. The system, dubbed MicroSput, was designed to be as flexible as possible, without sacrificing precision of process control or comprehensiveness of operations performed. MicroSput was successfully employed to provide plasma voltage control, which in turn allowed unprecedented investigations of the of the planar magnetron sputtering process.
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