- Library Home /
- Search Collections /
- Open Collections /
- Browse Collections /
- UBC Theses and Dissertations /
- Microsput : a microcomputer operating system for planar...
Open Collections
UBC Theses and Dissertations
UBC Theses and Dissertations
Microsput : a microcomputer operating system for planar magnetron sputtering McMahon, Richard William
Abstract
A Microcomputer software package was developed to monitor and control the planar magnetron sputtering process, and to record and display data from the process equipment. The system, dubbed MicroSput, was designed to be as flexible as possible, without sacrificing precision of process control or comprehensiveness of operations performed. MicroSput was successfully employed to provide plasma voltage control, which in turn allowed unprecedented investigations of the of the planar magnetron sputtering process.
Item Metadata
| Title |
Microsput : a microcomputer operating system for planar magnetron sputtering
|
| Creator | |
| Publisher |
University of British Columbia
|
| Date Issued |
1982
|
| Description |
A Microcomputer software package was developed to monitor and control the planar magnetron sputtering process, and to record and display data from the process equipment. The system, dubbed MicroSput, was designed to be as flexible as possible, without sacrificing precision of process control or comprehensiveness of operations performed. MicroSput was successfully employed to provide plasma voltage control, which in turn allowed unprecedented investigations of the of the planar magnetron sputtering process.
|
| Genre | |
| Type | |
| Language |
eng
|
| Date Available |
2010-04-13
|
| Provider |
Vancouver : University of British Columbia Library
|
| Rights |
For non-commercial purposes only, such as research, private study and education. Additional conditions apply, see Terms of Use https://open.library.ubc.ca/terms_of_use.
|
| DOI |
10.14288/1.0095276
|
| URI | |
| Degree | |
| Program | |
| Affiliation | |
| Degree Grantor |
University of British Columbia
|
| Campus | |
| Scholarly Level |
Graduate
|
| Aggregated Source Repository |
DSpace
|
Item Media
Item Citations and Data
Rights
For non-commercial purposes only, such as research, private study and education. Additional conditions apply, see Terms of Use https://open.library.ubc.ca/terms_of_use.