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The measurements of the optical properties of diamond-like carbon thin films by fourier-transform infrared spectroscopy Xie, Yidan
Abstract
Infrared reflectance and transmittance measurements of diamond-like carbon thin films grown by d.c. magnetron sputtering were performed at nearly normal incidence, using a Bruker IFS 1 13V Fourier-transform spectrometer. The project was a collaboration with Glenn Clarke, a Ph.D student under the supervision of Dr. R. Parsons. Glenn Clarke grew all of the films and extracted the absorption coefficient from the reflectivity and transmission data, using a matrix method. The spectral features were mainly the broad interference oscillations characteristic of thin films and the absorptions caused by excited vibrational modes. An interband-transition model of n and k, together with a dispersion model, which is a superposition of the background absorption and the vibrational resonances, was used to fit the experimental data and obtain some information about the chemical bonds in these films. It was found that the optical properties of the diamond-like carbon films were strongly dependent on the deposition pressure during the sputtering and any hydrogen incorporation.
Item Metadata
Title |
The measurements of the optical properties of diamond-like carbon thin films by fourier-transform infrared spectroscopy
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Creator | |
Publisher |
University of British Columbia
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Date Issued |
1994
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Description |
Infrared reflectance and transmittance measurements of diamond-like
carbon thin films grown by d.c. magnetron sputtering were performed at nearly
normal incidence, using a Bruker IFS 1 13V Fourier-transform spectrometer. The
project was a collaboration with Glenn Clarke, a Ph.D student under the
supervision of Dr. R. Parsons. Glenn Clarke grew all of the films and extracted the
absorption coefficient from the reflectivity and transmission data, using a matrix
method. The spectral features were mainly the broad interference oscillations
characteristic of thin films and the absorptions caused by excited vibrational
modes. An interband-transition model of n and k, together with a dispersion
model, which is a superposition of the background absorption and the vibrational
resonances, was used to fit the experimental data and obtain some information
about the chemical bonds in these films. It was found that the optical properties of
the diamond-like carbon films were strongly dependent on the deposition pressure
during the sputtering and any hydrogen incorporation.
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Extent |
2187359 bytes
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Genre | |
Type | |
File Format |
application/pdf
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Language |
eng
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Date Available |
2009-03-06
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Provider |
Vancouver : University of British Columbia Library
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Rights |
For non-commercial purposes only, such as research, private study and education. Additional conditions apply, see Terms of Use https://open.library.ubc.ca/terms_of_use.
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DOI |
10.14288/1.0087546
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URI | |
Degree | |
Program | |
Affiliation | |
Degree Grantor |
University of British Columbia
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Graduation Date |
1994-11
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Campus | |
Scholarly Level |
Graduate
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Aggregated Source Repository |
DSpace
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Item Media
Item Citations and Data
Rights
For non-commercial purposes only, such as research, private study and education. Additional conditions apply, see Terms of Use https://open.library.ubc.ca/terms_of_use.