UBC Theses and Dissertations

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UBC Theses and Dissertations

Characterization of LiCoO₂ thin film grown by pulsed laser deposition Song, Qun


This thesis is a presentation of experiments of LiCoOz thin film growth by pulsed laser deposition (PLD) for study using beta defected NMR of implanted ’Li. The films were characterized by ellipsometry to figure out their optical properties. Other characterization techniques were also applied such as x-ray diffraction (XRD) and atomic force microscope (AFM). It shows that PLD is a convenient technique to deposit LiCoOa thin film and the growth conditions have strong effect on the properties of the resulting films.

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