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UBC Theses and Dissertations

Evolution of surface texture in thermal chlorine etching and molecular beam epitaxy of gallium arsenide Schmid, Jens H.

Abstract

Many fabrication processes for semiconductor nanostructures rely on the understanding of surface pattern evolution during crystal growth and etching. In this thesis, the morphological evolution of GaAs surfaces during thermal chlorine etching and molecular beam epitaxial growth is investigated by atomic force microscopy and light scattering. The experimental results are compared to numerical simulations based on continuum models. For both etching and growth, the evolution of flat surfaces and small amplitude (

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