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Optical characterization of A1xGa1-xAs oxides Sfigakis, Francois
Abstract
The process of converting semiconducting Al₀.₉₈Ga₀.₀₂As layers grown by Molecular Beam Epitaxy (MBE) to a low refractive index oxide through exposure to water vapour at temperatures between 375-425°C has been studied. From contraction measurements and XRay diffraction (XRD) studies, it appears that the oxide cannot consist of a uniform layer of Al₂O₃-like material: it could either be a very porous form of Al₂O₃, an amorphous form of Al(OH)₃, or some combination. It is shown that good quality (crack-free, uniform on optical length scales) oxide layers can be formed from thick (0.5-2um) Al₀.₉₈Ga₀.₀₂As layers in ridge structures up to 70um wide. The refractive index of those layers was found to be 1.61±0.02.
Item Metadata
| Title |
Optical characterization of A1xGa1-xAs oxides
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| Creator | |
| Publisher |
University of British Columbia
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| Date Issued |
1999
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| Description |
The process of converting semiconducting Al₀.₉₈Ga₀.₀₂As layers grown by Molecular Beam
Epitaxy (MBE) to a low refractive index oxide through exposure to water vapour at
temperatures between 375-425°C has been studied. From contraction measurements and XRay
diffraction (XRD) studies, it appears that the oxide cannot consist of a uniform layer of
Al₂O₃-like material: it could either be a very porous form of Al₂O₃, an amorphous form of
Al(OH)₃, or some combination. It is shown that good quality (crack-free, uniform on optical
length scales) oxide layers can be formed from thick (0.5-2um) Al₀.₉₈Ga₀.₀₂As layers in ridge
structures up to 70um wide. The refractive index of those layers was found to be 1.61±0.02.
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| Extent |
12122928 bytes
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| Genre | |
| Type | |
| File Format |
application/pdf
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| Language |
eng
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| Date Available |
2009-06-12
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| Provider |
Vancouver : University of British Columbia Library
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| Rights |
For non-commercial purposes only, such as research, private study and education. Additional conditions apply, see Terms of Use https://open.library.ubc.ca/terms_of_use.
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| DOI |
10.14288/1.0085099
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| URI | |
| Degree | |
| Program | |
| Affiliation | |
| Degree Grantor |
University of British Columbia
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| Graduation Date |
1999-05
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| Campus | |
| Scholarly Level |
Graduate
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| Aggregated Source Repository |
DSpace
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Rights
For non-commercial purposes only, such as research, private study and education. Additional conditions apply, see Terms of Use https://open.library.ubc.ca/terms_of_use.