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UBC Theses and Dissertations
A radiation model of a Rapid Thermal Processing system Wacher, Abigail
Abstract
In this thesis we study the radiative heat transfer that takes place in the axially symmetric Vortek rapid thermal processing chamber. A radiation model is derived using the theory of Shape Factors which we use to predict how chamber geometry and materials affect temperature uniformity on the processed silicon wafer. Using a series of numerical experiments on an axially symmetric domain we are able to predict the radiative effects on the temperature uniformity of the processed wafer in terms of the size of the showerhead and guard ring, the reflectivity of the showerhead and the chamber height.
Item Metadata
| Title |
A radiation model of a Rapid Thermal Processing system
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| Creator | |
| Publisher |
University of British Columbia
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| Date Issued |
2001
|
| Description |
In this thesis we study the radiative heat transfer that takes place in the
axially symmetric Vortek rapid thermal processing chamber. A radiation model
is derived using the theory of Shape Factors which we use to predict how
chamber geometry and materials affect temperature uniformity on the processed
silicon wafer. Using a series of numerical experiments on an axially symmetric
domain we are able to predict the radiative effects on the temperature uniformity
of the processed wafer in terms of the size of the showerhead and guard ring, the
reflectivity of the showerhead and the chamber height.
|
| Extent |
2371179 bytes
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| Genre | |
| Type | |
| File Format |
application/pdf
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| Language |
eng
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| Notes |
1 Disk
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| Date Available |
2009-09-14
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| Provider |
Vancouver : University of British Columbia Library
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| Rights |
For non-commercial purposes only, such as research, private study and education. Additional conditions apply, see Terms of Use https://open.library.ubc.ca/terms_of_use.
|
| DOI |
10.14288/1.0080090
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| URI | |
| Degree | |
| Program | |
| Affiliation | |
| Degree Grantor |
University of British Columbia
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| Graduation Date |
2001-05
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| Campus | |
| Scholarly Level |
Graduate
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| Aggregated Source Repository |
DSpace
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Item Media
Item Citations and Data
Rights
For non-commercial purposes only, such as research, private study and education. Additional conditions apply, see Terms of Use https://open.library.ubc.ca/terms_of_use.