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A 2D conduction-convection model of a Jet impinging on a flat plate Bolton, Matthew Robert

Abstract

A two dimensional model of a jet impinging on a heated wafer is constructed. After neglecting buoyancy, a Navier-Stokes solver provides the flow velocity such that the energy equation can be used to solve for the temperature in the gas. Using a coupling condition, a heat conduction solver in the wafer is coupled to the energy equation solver in the gas, and as such the heat transfer across the surface of the wafer can be computed. A predictive formula is constructed for the surface heat transfer coefficient in terms of the Reynolds number and the ratio of the jet height to the nozzle width.

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