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UBC Theses and Dissertations
Dynamic scheduling in a cluster tool for semiconductor manufacturing Manoochehri, Sasan
Abstract
Cluster tools play an important role in the semiconductor fabrication industry. Optimization of an individual cluster tool maximizes productivity of mass fabrication. Optimizing the scheduler results in increased throughput. The cluster tool is a real-time, dynamic environment in which different parts interact. That is why it is necessary to have a dynamic scheduler that makes its decisions online and within an acceptable computation time in the presence of unexpected sporadic events. Our contribution is to develop and implement a scheduler for a cluster tool. Attributes of the scheduler are predictive, periodic and dynamic to satisfy real-time characteristics of the cluster tool. The major characteristic of the scheduler is that it is optimized to produce high throughput and low complexity, i.e. time to schedule as overhead. First steady-state and transient-state of the cluster tool are analyzed. Then different scheduling algorithms are experimented with and compared. As the results of experiments demonstrate, throughput is optimized in steady-state and transient-state of the scheduler with low overhead.
Item Metadata
Title |
Dynamic scheduling in a cluster tool for semiconductor manufacturing
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Creator | |
Publisher |
University of British Columbia
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Date Issued |
2001
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Description |
Cluster tools play an important role in the semiconductor fabrication industry. Optimization
of an individual cluster tool maximizes productivity of mass fabrication. Optimizing the
scheduler results in increased throughput.
The cluster tool is a real-time, dynamic environment in which different parts interact. That is
why it is necessary to have a dynamic scheduler that makes its decisions online and within an
acceptable computation time in the presence of unexpected sporadic events.
Our contribution is to develop and implement a scheduler for a cluster tool. Attributes of the
scheduler are predictive, periodic and dynamic to satisfy real-time characteristics of the
cluster tool. The major characteristic of the scheduler is that it is optimized to produce high
throughput and low complexity, i.e. time to schedule as overhead.
First steady-state and transient-state of the cluster tool are analyzed. Then different
scheduling algorithms are experimented with and compared. As the results of experiments
demonstrate, throughput is optimized in steady-state and transient-state of the scheduler with
low overhead.
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Extent |
3854171 bytes
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Genre | |
Type | |
File Format |
application/pdf
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Language |
eng
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Date Available |
2009-07-28
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Provider |
Vancouver : University of British Columbia Library
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Rights |
For non-commercial purposes only, such as research, private study and education. Additional conditions apply, see Terms of Use https://open.library.ubc.ca/terms_of_use.
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DOI |
10.14288/1.0065378
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URI | |
Degree | |
Program | |
Affiliation | |
Degree Grantor |
University of British Columbia
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Graduation Date |
2001-05
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Campus | |
Scholarly Level |
Graduate
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Aggregated Source Repository |
DSpace
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Item Media
Item Citations and Data
Rights
For non-commercial purposes only, such as research, private study and education. Additional conditions apply, see Terms of Use https://open.library.ubc.ca/terms_of_use.