Optimization and characterization of atomic-layer-deposited tin oxide thin films metal oxide semiconductor (MOS) sensors to detect polar and non-polar volatile organic compounds
department or school: Applied Science, Faculty of
department or school: Engineering, School of (Okanagan)
data provider: DSpace
degree campus: UBCO
creator: Nobakhti, Mohammadali
issued: 2022-01-06T20:17:43Z
issued: 2021
related degree: Master of Applied Science - MASc
degree grantor: University of British Columbia
description: Owing to the significant emission of Volatile Organic Compound gases (VOCs) by the oil and natural gas industry and considering the adverse health and environmental effects associated with VOCs exposure, the need for implementing accurate and real-time VOC sensors in air quality monitoring systems is crucial. In the last few decades, various methods have been developed for detecting VOC gases. Out of all of the developed methods, Metal Oxide Semiconductor (MOS) sensors are the most known for their usage as cheap, accurate, and disposable sensors for sensing VOCs in many industrial applications. Due to its high bandgap energy, tin oxide (SnO₂) is considered as one of the best materials to manufacture a MOS sensor. Up to now, extensive research has been done on optimizing the SnO₂-based gas sensor performance; however, to the best of our knowledge, less attention has been paid to optimizing an ALD-deposited SnO₂ thin film as a sensing layer. Moreover, the relationship between the target gas polarity and the mentioned optimization has not been investigated before. In this study, we present an extensive characterization of an atomic-layer-deposited SnO₂-based thin film gas sensor to detect selected polar and non-polar VOCs, namely ethanol, acetone, and toluene, for a concentration range of 20- 227 ppm. The deposited SnO₂ thin film with an approximate thickness of 40 nm showed the highest response to target VOCs, irrespective of the operating temperature or the target VOC polarity. Importantly, our results suggested that the operating temperature of the sensor was dependent on the polarity of the target analytes. The developed SnO₂-based MOS sensors can therefore be tuned to selectively differentiate between target gases based on their polarity. This can be advantageous for detecting mixtures of polar and non-polar VOCs. A good example of a practical application for selective detection of mixture of VOCs can be in Natural Gas-related industries to analyze the gas compone…
aggregated CHO: https://circle.library.ubc.ca/rest/handle/2429/80551
note: OPTIMIZATION AND CHARACTERIZATION OF ATOMIC-LAYER-DEPOSITED TIN OXIDE THIN FILMS METAL OXIDE SEMICONDUCTOR (MOS) SENSORS TO DETECT POLAR AND NON-POLAR VOLATILE ORGANIC COMPOUNDS by Mohammadali Nobakhti B.Sc., University of Tehran, 2019 A THESIS SUBMITTED IN PARTIAL FULFILLMENT OF THE REQUIREMENTS FOR THE DEGREE OF MASTER OF APPLIED SCIENCE in The College of Graduate Studies (Mechanical Engineering) THE UNIVERSITY OF BRITISH COLUMBIA (Okanagan) December 2021 © Mohammadali Nobakhti, 2021 ii The following individuals certify that they have read, and recommend to the College of Graduate Studies for acceptance, a thesis/dissertation entitled: OPTIMIZATION AND CHARACTERIZATION OF ATOMIC-LAYER-DEPOSITED TIN OXIDE THIN FILMS METAL OXIDE SEMICONDUCTOR (MOS) SENSORS TO DETECT POLAR AND NON-POLAR VOLATILE ORGANIC COMPOUNDS submitted by Mohammadali Nobakhti in partial fulfillment of the requirements of the degree of Master of Applied Science. Dr. Mina Hoorfar, School of Engineering Supervisor Dr. Jian Liu, School of Engineering Co-Supervisor Dr. Homayoun Najjaran, School of Engineering Supervisory Committee Member Dr. Alexander Uhl, School of Engineering Supervisory Committee Member Dr. Mahmudur Fatmi, School of Engineering University Examiner iii Abstract Owing to the significant emission of Volatile Organic Compound gases (VOCs) by the oil and natural gas industry and considering the adverse health and environmental effects associated with VOCs exposure, the need for implementing accurate and real-time VOC sensors in air quality monitoring systems is crucial. In the last few decades, various methods have been developed for detecting VOC gases. Out of all of the developed methods, Metal Oxide Semiconductor (MOS) sensors are the most known for their usage as cheap, accurate, and disposable sensors for sensing VOCs in many industrial applications. Due to its high bandgap energy, tin oxide (SnO2) is considered as one of the best materials to manufacture a MOS sensor. Up to now, e…
has type: Thesis/Dissertation
date issued: 2022-02
is shown at: 10.14288/1.0406186
language: eng
degree discipline: Mechanical Engineering
provider: Vancouver : University of British Columbia Library
publisher: University of British Columbia
rights: Attribution-NonCommercial-NoDerivatives 4.0 International
rights URI: http://creativecommons.org/licenses/by-nc-nd/4.0/
scholar level: Graduate
contributor: Hoorfar, Mina
contributor: Liu, Jian
type: Text
identifier URI: http://hdl.handle.net/2429/80551