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Characterization of GaAs/Ga₁₋ Al As multilayer system by infrared spectroscopy at normal incidence Zeng, An
Abstract
The infrared reflectance spectra of GaAs/Ga₁₋xAlAs multilayer structures at normal incidence from the far-infrared to the near-infrared have been measured using a Bruker IF 113v spectrometer. The main structure in the spectra are due to the phonon reststrahlen bands, the Fabry-Perot interference and the plasma edge of the free carriers. An optical impedance method was successfully used to calculate the reflectance spectra at normal incidence. Through fitting the spectra, we determined both electrical and structural parameters, which are usually determined by several different methods. These parameters include the carrier concentration n, mobility µ, conductivity σ, Al concentration x, and the thickness di of each layer. The agreement between the theoretical spectra and the experiments is excellent.
Item Metadata
Title |
Characterization of GaAs/Ga₁₋ Al As multilayer system by infrared spectroscopy at normal incidence
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Creator | |
Publisher |
University of British Columbia
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Date Issued |
1992
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Description |
The infrared reflectance spectra of GaAs/Ga₁₋xAlAs multilayer structures at normal
incidence from the far-infrared to the near-infrared have been measured using a Bruker IF
113v spectrometer. The main structure in the spectra are due to the phonon reststrahlen
bands, the Fabry-Perot interference and the plasma edge of the free carriers. An optical
impedance method was successfully used to calculate the reflectance spectra at normal
incidence. Through fitting the spectra, we determined both electrical and structural
parameters, which are usually determined by several different methods. These parameters
include the carrier concentration n, mobility µ, conductivity σ, Al concentration x, and
the thickness di of each layer. The agreement between the theoretical spectra and the
experiments is excellent.
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Extent |
1471809 bytes
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Genre | |
Type | |
File Format |
application/pdf
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Language |
eng
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Date Available |
2009-01-05
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Provider |
Vancouver : University of British Columbia Library
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Rights |
For non-commercial purposes only, such as research, private study and education. Additional conditions apply, see Terms of Use https://open.library.ubc.ca/terms_of_use.
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DOI |
10.14288/1.0085437
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URI | |
Degree | |
Program | |
Affiliation | |
Degree Grantor |
University of British Columbia
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Graduation Date |
1992-11
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Campus | |
Scholarly Level |
Graduate
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Aggregated Source Repository |
DSpace
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Item Media
Item Citations and Data
Rights
For non-commercial purposes only, such as research, private study and education. Additional conditions apply, see Terms of Use https://open.library.ubc.ca/terms_of_use.