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- Computational lithography for silicon photonics design
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Computational lithography for silicon photonics design Lin, Stephen
Abstract
A lithography model is built using physical measurements obtained from a fabricated test pattern. The method is able to accurately predict the proximity and smoothing effects characteristic of a 193~nm deep-ultraviolet (DUV) lithography process. The accuracy of the model is verified by visually inspecting the fabricated test patterns and comparing them to the predictions of the lithography model. Furthermore, using a benchmark device (the contra-directional coupler), the prediction accuracy of the optical response is compared against experimental measurements. The comparisons showed the predictions had good agreement with the fabricated devices. Subsequently, an application of the lithography model is demonstrated. Design correction methods enabled by the lithography model are performed on the contra-directional coupler. The new designs were fabricated using electron-beam lithography and their experimental measurements confirmed an improved optical performance.
Item Metadata
Title |
Computational lithography for silicon photonics design
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Creator | |
Publisher |
University of British Columbia
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Date Issued |
2020
|
Description |
A lithography model is built using physical measurements obtained from a
fabricated test pattern. The method is able to accurately predict the
proximity and smoothing effects characteristic of a 193~nm
deep-ultraviolet (DUV) lithography process.
The accuracy of the model is verified by visually inspecting the
fabricated test patterns and comparing them to the predictions of the
lithography model. Furthermore, using a benchmark device (the
contra-directional coupler), the prediction accuracy of the optical
response is compared against experimental measurements. The comparisons
showed the predictions had good agreement with the fabricated devices.
Subsequently, an application of the lithography model is demonstrated.
Design correction methods enabled by the lithography model are performed
on the contra-directional coupler. The new designs were fabricated using
electron-beam lithography and their experimental measurements confirmed
an improved optical performance.
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Genre | |
Type | |
Language |
eng
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Date Available |
2020-03-05
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Provider |
Vancouver : University of British Columbia Library
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Rights |
Attribution-NonCommercial-NoDerivatives 4.0 International
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DOI |
10.14288/1.0388871
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URI | |
Degree | |
Program | |
Affiliation | |
Degree Grantor |
University of British Columbia
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Graduation Date |
2020-05
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Campus | |
Scholarly Level |
Graduate
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Rights URI | |
Aggregated Source Repository |
DSpace
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Item Citations and Data
Rights
Attribution-NonCommercial-NoDerivatives 4.0 International