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Abstract

Biomedical applications of Micro-Electro-Mechanical System (MEMS) technology have sprung growth in the field of microfluidic systems and have been attracting much attention from scientific researchers and industry. Implantable drug delivery devices can deliver localized dosage which can reduce the side effects of medication. Such devices can maintain therapeutic concentrations of the drug over extended periods by providing small doses minimizing the risk of systemic toxicity. Recently, ocular drug delivery devices with micropumps using check valves have been demonstrated. The use of external magnetic actuation in a MEMS-based drug delivery device has been verified in reciprocating diaphragm micropumps. However, the magnetic diaphragm generates low pressures resulting in low flow rates (Re