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UBC Theses and Dissertations
Characterizing etched grating profiles with the Alpha-particle Energy Loss method Kaiser, Christina
Abstract
The effectiveness of Alpha-particle Energy Loss (AEL) spectroscopy for profiling 1D
grating structures was investigated. An analytic simulation of AEL spectra was developed
and compared with a Monte Carlo simulation. By a least squares fitting
procedure, the analytic simulation was used to extract grating parameters from the
experimental spectra of two types of grating structures. A 1D grating of silicon bars
on a free standing silicon dioxide support layer was fabricated and profiled by AEL
spectroscopy: the grating depth was determined along with a qualitative assessment
of the grating sidewalls. AEL profiling of a gallium arsenide grating structure yielded
measurement values in agreement with those obtained with a scanning electron microscope.
Item Metadata
| Title |
Characterizing etched grating profiles with the Alpha-particle Energy Loss method
|
| Creator | |
| Publisher |
University of British Columbia
|
| Date Issued |
2001
|
| Description |
The effectiveness of Alpha-particle Energy Loss (AEL) spectroscopy for profiling 1D
grating structures was investigated. An analytic simulation of AEL spectra was developed
and compared with a Monte Carlo simulation. By a least squares fitting
procedure, the analytic simulation was used to extract grating parameters from the
experimental spectra of two types of grating structures. A 1D grating of silicon bars
on a free standing silicon dioxide support layer was fabricated and profiled by AEL
spectroscopy: the grating depth was determined along with a qualitative assessment
of the grating sidewalls. AEL profiling of a gallium arsenide grating structure yielded
measurement values in agreement with those obtained with a scanning electron microscope.
|
| Extent |
7674457 bytes
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| Genre | |
| Type | |
| File Format |
application/pdf
|
| Language |
eng
|
| Date Available |
2009-07-30
|
| Provider |
Vancouver : University of British Columbia Library
|
| Rights |
For non-commercial purposes only, such as research, private study and education. Additional conditions apply, see Terms of Use https://open.library.ubc.ca/terms_of_use.
|
| DOI |
10.14288/1.0099589
|
| URI | |
| Degree (Theses) | |
| Program (Theses) | |
| Affiliation | |
| Degree Grantor |
University of British Columbia
|
| Graduation Date |
2001-05
|
| Campus | |
| Scholarly Level |
Graduate
|
| Aggregated Source Repository |
DSpace
|
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Rights
For non-commercial purposes only, such as research, private study and education. Additional conditions apply, see Terms of Use https://open.library.ubc.ca/terms_of_use.